Patented Ultrasonic Flow Meter Technology combined with Dymatrix® pinch valves for ultimate CMP slurry flow control. Directionally concentrated, repeatable flow signal immune to bubbles and temperature fluctuations. Highly accurate control with fast response times.
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Fast and accurate flow control reduces waste and optimizes CMP slurry consumption.
Patented ultrasonic technology generates precision flow measurement immune to bubbles and temperature.
Straight flow path design prevents slurry clogging for reliable long-term operation.
Proven Dymatrix® pinch valve provides long life in aggressive slurry applications.
3% S.P. accuracy with 1.5% S.P. repeatability ensures consistent process control.
Response time and shut-off speed under 3.0 seconds for rapid process adjustments.
Asahi/America's patented ultrasonic flow meter technology creates a directionally concentrated and repeatable flow signal despite bubbles and temperature fluctuations. This innovative approach ensures precision measurement in challenging CMP slurry conditions.
Asahi's proven Dymatrix® pinch valve offers the most durable and reliable valve for aggressive slurry applications. The pinch valve design provides long service life even with abrasive CMP slurries.
Together, these features provide highly accurate control and fast response times, which generates a strong ROI. Reduced waste, improved process consistency, and long valve life combine to deliver substantial cost savings in CMP operations.
Specifically designed and optimized for Chemical Mechanical Planarization (CMP) slurry applications in semiconductor manufacturing. The ultimate choice for precise flow control in this demanding application.
Contact us for additional information, technical support, and complete specifications for your CMP slurry flow control needs
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